There are several cylinder options to choose from with volumes ranging from 50ml to 200ml. We offer a variety of configurations to meet your ALD equipment needs. Valve type options include ball valves rated up to 300°F or bellows valves rated up to 600°F. We also offer high purity and ultra-high purity diaphragm valves rated up to 302°F.
We continue not only to provide a wide variety of high purity precursors and several cylinder options, but we also strive to build ongoing relationships with our customers by offering fast refilling and cleaning services.
Please visit the links below for related products and a list of CVD/ALD precursors pre-packaged into cylinders:
Cylinders, Bubblers & Other Equipment
Chemical Vapor Deposition / Atomic Layer Deposition (CVD/ALD) Precursors contained in Swagelok® Cylinders.